System Integration

On request Nor-Cal can assemble an entire system including chamber, frame, pumps, gauges, valves, manipulators and other components to customer specifications.

After completion our vacuum technicians can complete a thorough qualification of system performance, including time to base pressure and RGA scan, before the system is back filled with nitrogen and shipped to the customer.

Nor-Cal uses the most up-to-date equipment and procedures for the inspection of vacuum chambers. Every weld is leak checked with a helium mass spectrometer to insure leak rates of 10-9 std. cc./sec. or less.

Mechanical inspection is accomplished with a coordinate measuring machine (CMM). We can provide our customers with CMM inspection reports of their chambers on request.

Our chamber qualification test bench is available to customers who request residual gas analyzer (RGA) scans of their chamber after a 24 hour vacuum bake. The test bench contains vacuum pumps, gauges, RGA, quartz heaters, nitrogen back fill and a leak detector.

Once water and other background are eliminated by the 150°C bakeout we can provide the customer with customized scans to detect the slightest contamination in the chamber.

Whatever the sensitivity of our customer’s application, we can guarantee that contaminants will be within acceptable limits.